Rapid Semiconductor Inspection with Microscope Contrast Methods
Performing quality control of semiconductors efficiently and reliably in the electronics industry by revealing critical details with light microscopy
Semiconductor inspection during production of patterned wafers and ICs (integrated circuits) is important for identifying and minimizing defects. To enhance the efficiency of quality control at an early production stage and ensure reliable IC-chip performance, microscopy solutions should combine different contrast methods that provide complete and accurate information about different defects. Contrast methods, i.e., brightfield, darkfield, polarization, DIC, UV, oblique, and