DM8000 M & DM12000 M Optical inspection systems
Improve your decision-making for product quality and save time by gaining deeper insights into samples with the DM8000 M and DM12000 M optical inspection systems.
These inspection microscopes offer fast and reliable inspection and analysis of materials like semiconductors and wafers, enabling you to perform quality control and detect defects fast.
Visualize structures and defects quickly
Detect and analyze various structures and defects, such as scratches and contamination, on your samples. Choose from an array of illumination and contrast methods, such as brightfield, darkfield, polarization, differential interference contrast (DIC), fluorescence (Fluo), and infrared (IR), to help you perform inspection quickly and reliably. Improve resolution with ultraviolet (UV) light.
Gain additional surface information with oblique illumination. Combine it with UV to further enhance the contrast.
Find defects faster during fracture analysis with higher contrast supported by the advanced darkfield technique with Plan Fluotar objectives (20x, 50x, and 100x).
Images of a wafer surface acquired with different illumination and contrast methods where contamination can be clearly seen on the right image.
Save time with a fast sample overview
Reveal macro defects and structures in material samples quickly using the optional 0.7x Macro objective. The Macro objective offers an approximately 36 mm field of view for fast orientation and efficient screening, saving you time.
For inspection of tall samples with a height above 42 mm, the microscope can be equipped with a "material" incident light axis. When using this axis, the inspection of samples with a small height will need a stage insert.
Brightfield images of a patterned wafer
Make fewer adjustments thanks to automation
During inspection and quality control you can save time and reduce errors thanks to automatic adjustments of settings and the intuitive focus operation. With a press of a button, the objective is changed and the illumination and contrast settings are automatically adjusted.
The motorized nosepiece enables fast and comfortable changing of objectives, reducing unnecessary movement to save you time and effort. The sample is better protected from contamination as operators do not need to manually change the objectives.
In addition, the 150x VIS-UV objective allows you to utilize all contrast methods without changing objectives.
Examine samples with easy operation
The easy and intuitive focus features help you to examine your samples quickly and confidently.
- For samples with highly reflective surfaces, such as bare wafers, use the focus finder to focus easily and quickly.
- Use the built-in focus stop with a large vertical range for samples of different heights to protect them from inadvertent damage.
- Easily switch magnifications without the need to readjust your focus thanks to the parfocal objectives.
Work in comfort and increase productivity
The ergonomic design and automated features of the DM8000 M and DM12000 M microscopes enable fatigue-free operation to help you concentrate on your samples, especially during repetitive inspections.
With individually adjustable ergonomic tubes and height-adjustable focus knobs, you can ensure optimal comfort at your workstation during routine inspections and other applications.
Designed for a safe and controlled environment
The DM8000 M and DM12000 M can be used in clean rooms when you need to inspect mission critical components.
- Conductive materials with surface resistivity protect your products against electrostatic discharge.
- The encapsulated motorized nosepiece is designed for demanding environmental conditions.
- Integrated LED illumination for visible and UV light reduces the risk of contamination.
For clean rooms, the microscope design optimizes airflow around it, ensuring the laminar flow remains undisturbed.
DM8000 M / DM12000 M manual
Choose the manual solution for needs requiring
- Basic inspection of samples on a weekly basis
- Moderate sample throughput
- Manual sample positioning
DM8000 M / DM12000 M motorized
Choose the motorized solution for needs requiring:
- Advanced inspection of samples on a daily basis
- High sample throughput
- Usage of the same microscope by multiple users
Find the solution for your needs
The DM8000 M and DM12000 M microscopes help you ensure efficient and fast inspection of 8-inch and 12-inch samples. Dedicated configurations are available for your specific application needs.
| DM8000 M / DM12000 M manual | DM8000 M / DM12000 M motorized |
| Manual sample positioning | x | x |
| High-contrast inspection | x | x |
| Visualization of fine structures | x | x |
| UV and oblique UV illumination | o | o |
| Automation and user-friendly operation | - | x |
x = included, o = optional, - = not available
