Science Lab

Science Lab

ライカマイクロシステムズのナレッジポータルでは、顕微鏡の基礎から最先端技術まで、幅広い情報を提供しています。初心者から熟練者、研究者、医師の皆様まで、日々の研究や実験に役立つ内容となっております。チュートリアルやアプリケーションノートを活用し、学びながら探究心を刺激してください。さらに、コミュニティに参加することで、知見を共有し、新たな発見へとつなげましょう。お気軽に参加いただき、互いの専門知識を深め合う場としてご活用ください。
Optical microscope image, which is a composition of both brightfield and fluorescence illumination, showing organic contamination on a wafer surface. The inset images in the upper left corner show the brightfield image (above) and fluorescence image (below with dark background).

Visualizing Photoresist Residue and Organic Contamination on Wafers

As the scale of integrated circuits (ICs) on semiconductors passes below 10 nm, efficient detection of organic contamination, like photoresist residue, and defects during wafer inspection is becoming…
Image of burrs (red arrows) at the edge of a battery electrode acquired with a DVM6 digital microscope.

Burr Detection During Battery Manufacturing

See how optical microscopy can be used for burr detection on battery electrodes and determination of damage potential to achieve rapid and reliable quality control during battery manufacturing.
Images of the same area of a processed wafer taken with standard (left) and oblique (right) brightfield illumination using a Leica compound microscope. The defect on the wafer surface is clearly more visible with oblique illumination.

Rapid Semiconductor Inspection with Microscope Contrast Methods

Semiconductor inspection during the production of patterned wafers and ICs (integrated circuits) is important for identifying and minimizing defects. To increase the efficiency of quality control in…
Wafer

How to Boost your Microelectronic Component Inspection Performance

Do you need to see more when inspecting silicon wafers or MEMS? Would you like to get sharp and detailed sample images which are similar to those from electron microscopes? Watch this free webinar…

Brief Introduction to Surface Metrology

This report briefly discusses several important metrology techniques and standard definitions commonly used to assess the topography of surfaces, also known as surface texture or surface finish. With…
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